Handles compact 3-port valve applications across the board. (Air operated valve/cylinder drive, suction transport,
air blow, etc.)
3QE / Z Series for positive pressure only,
3QB Series for positive and negative pressure,
3QR Series with large flow rate for positive and negative pressure.
[Cylinder bore size: φ6 to φ20]
Industry:
Semiconductor manufacturing process (pre-process)
Semiconductor manufacturing process (post-process)