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Compact Flow Rate Sensor Rapiflow(R) (FSM3)

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Compact Flow Rate Sensor Rapiflow(R) (FSM3) Flow sensors / controllers Sensors CKD


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FSM3_Series_Introduction.pdf (1.65 MB)
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
 
Industry:
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products
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