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Miniature flow rate sensor for gas RAPIFLOW (R) (FSM)

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Miniature flow rate sensor for gas RAPIFLOW (R) (FSM) Flow sensors / controllers Sensors CKD


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FSM_Series_Introduction.pdf (274.13 KB)
Miniature flow sensor for compressed air and nitrogen gas. It is ideal for checking suction of electronic parts and the like thanks to its light weight and high-speed response.
 
Industry:
  • Semiconductor manufacturing process (post-process)
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