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Ejector unit (10.3 mm width) (VSN/VSNM)

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Ejector unit (10.3 mm width) (VSN/VSNM) Ejector system Vacuum system components CKD


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VSN___VSNM_Series.pdf (1.41 MB)

Compact ejector unit that achieves high speed and stable response.

Compact and lightweight, with height dimension especially compact.

[Nozzle diameter] 0.4, 0.5, 0.6 (mm)
 
[Intake flow rate] 2 to 9.5 (L/min (ANR))
 
Industry:
  • Semiconductor manufacturing process (post-process)
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