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Vacuum pressure control system (IAVB)

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Vacuum pressure control system (IAVB) High vacuum components Components for high vacuum / special gas CKD


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IAVB_Series.pdf (310.48 KB)
While maintaining the reliability of the conventional high vacuum valve, it has achieved pressure control that enables various processes.
 
Industry:
  • Semiconductor manufacturing process (pre-process)
  • Semiconductor manufacturing process (post-process)
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